V-Groove MOS (VMOS)
V-Groove MOS (VMOS) This article explains in detail about the structure of VMOS with diagram, its characteristics, anisotropic etching and also the applications of VMOS. To know the basics, click on the links given below. TAKE A LOOK : SHORT CHANNEL MOS STRUCTURES VMOS Structure The structure of VMOS is similar to short-channel power FET that is constructed as a vertical structure. The operation is same as that of a Double-Diffused MOS (DMOS) device. Take a look at the figure below to know more about the VMOS structure. This device, like a DMOS device has a channel length which is…
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